L. Rafael Reif
Professor and Associate Department Head
Associate Department Head
L. Rafael Reif
http://web.mit.edu/
Electrical Engineering and Computer Science
http://www-eecs.mit.edu
Massachusetts Institute of Technology
Room 38-401
77 Massachusetts Avenue
Cambridge, Massachusetts 02139-4307
Contact by e-mail?
Integrated circuit fabrication technology. New process technologies for VLSI. Multilevel interconect technologies. Three-dimensional integration. Environmentally-benign semiconductor manufacturing.
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