Duane Boning
Academic Title:
Professor
Administrative Title:
Associate Department Head
Name:
Duane Boning
Personal Website:
http://www-mtl.mit.edu/~boning
Department:
Electrical Engineering and Computer Science
Department Website:
http://www-eecs.mit.edu
Institution:
Massachusetts Institute of Technology
Address:
Room 38-401
Highest Degree:
PhD
Date of Degree:
1991
Degree Institution:
Massachusetts Institute of Technology
E-mail:
Contact by e-mail?
Expertise:
Semiconductor manufacturing. Metrology and modeling of IC process and device variation. Process control for variation reduction. Computer tools and systems for IC process and device design.
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