Mark G Allen
Emeritus Professor
Mark G Allen
Electrical and Computer Engineering
http://www.ece.gatech.edu/
Georgia Institute of Technology
Tech Tower 225 North Avenue
Atlanta, Georgia 30332-0360
Contact by e-mail?
Micromachining
Microsensor and microactuator fabrication compatible with the IC fabrication
Microelectromechanical systems (MEMS)
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